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050 1 4 _aTK7874
_b.S524 2004
090 _aDVD TK 7874 .S524 2004
245 0 0 _aSilicon run implantation
_h[videorecording] /
_ca film by Ruth A. Carranza [in collaboration with the Stanford Nanofabrication Facility] ; producer/director, Ruth A. Carranza ; writers, Ruth Carranza, John Shott.
246 3 0 _aImplantation.
260 _aMountain View, CA :
_bRuth Carranza Productions :
_bSilicon Run Productions,
_cc2004, 2003.
300 _a1 videodisc (31 min.) :
_bsd., col. ;
_c4 3/4 in.
500 _aA presentation of National Science Foundation, Texas Instruments, Axcelis Technologies, Semiconductor Equipment and Materials International, Maricopa Advanced Technology Education Center, Stanford Nanofabrication Facility.
505 0 _aIntroduction -- CMOS transistors -- High energy deep well implant -- Medium current threshold adjust implant -- Medium current halo implant -- Low energy/high current source & drain implant -- Rapid thermal anneal -- Ending & credits.
511 0 _aNarrator, Mary Dilts.
520 _aAn in-depth look at the process of ion implantation.
538 _aDVD; NTSC.
650 0 _aIon implantation.
_953285
650 0 _aIntegrated circuits
_xDesign and construction.
_9183403
655 0 _aDocumentary films.
_9183404
700 1 _aCarranza, Ruth A.,
_d1949-
_9169460
700 1 _aShott, John.
_9183405
700 1 _aDilts, Mary.
_9183406
710 2 _aStanford Nanofabrication Facility.
_9183407
710 2 _aRuth Carranza Productions.
_9183408
710 2 _aSilicon Run Productions.
_9169467
907 _a31626
_b02-28-11
_c02-28-11
942 _cDVD
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_b02-28-11
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_d31626