TY  - BOOK
AU  - Kundu,Sandip
AU  - Sreedhar,Aswin
TI  - Nanoscale CMOS VLSI circuits: design for manufacturability 
SN  - 9780071635196 :
AV  - TK7871.99.M44 K84 2010
PY  - 2010///
CY  - New York
PB  - McGraw-Hill
KW  - Metal oxide semiconductors, Complementary
KW  - Design and construction
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Nanoelectronics
N1  - Includes bibliographical references and index; Semiconductor manufacturing -- Process and device variability : analysis and modeling -- Manufacturing-aware physical design closure -- Metrology, manufacturing defects, and defect extraction -- Defect impact modeling and yield improvement techniques -- Physical design and reliability -- Design for manufacturability : tools and methodologies
ER  -