TY  - ADVS
AU  - Carranza,Ruth A.
AU  - Shott,John
AU  - Dilts,Mary
ED  - Stanford Nanofabrication Facility.
ED  - Ruth Carranza Productions.
ED  - Silicon Run Productions.
TI  - Silicon run implantation
AV  - TK7874 .S524 2004
PY  - 2004///, 2003
CY  - Mountain View, CA
PB  - Ruth Carranza Productions, Silicon Run Productions
KW  - Ion implantation
KW  - Integrated circuits
KW  - Design and construction
KW  - Documentary films
N1  - A presentation of National Science Foundation, Texas Instruments, Axcelis Technologies, Semiconductor Equipment and Materials International, Maricopa Advanced Technology Education Center, Stanford Nanofabrication Facility; Introduction -- CMOS transistors -- High energy deep well implant -- Medium current threshold adjust implant -- Medium current halo implant -- Low energy/high current source & drain implant -- Rapid thermal anneal -- Ending & credits; Narrator, Mary Dilts
N2  - An in-depth look at the process of ion implantation
ER  -